Membership
Tour
Register
Log in
HIROMICHI HARA
Follow
Person
UTSUNOMIYA-SHI, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Vibration damping apparatus, lithography apparatus, and method of m...
Patent number
10,481,509
Issue date
Nov 19, 2019
Canon Kabushiki Kaisha
Yoshihiro Morimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, structure, method for setting up apparatus, and...
Patent number
8,780,329
Issue date
Jul 15, 2014
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,944,546
Issue date
May 17, 2011
Canon Kabushiki Kaisha
Masatomi Yoshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,821,617
Issue date
Oct 26, 2010
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,227,617
Issue date
Jun 5, 2007
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
6,914,663
Issue date
Jul 5, 2005
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
6,897,939
Issue date
May 24, 2005
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method of manufacturing a semiconductor devi...
Patent number
6,885,431
Issue date
Apr 26, 2005
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Anti-vibration system for exposure apparatus
Patent number
6,862,077
Issue date
Mar 1, 2005
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Anti-vibration system for exposure apparatus
Patent number
6,512,571
Issue date
Jan 28, 2003
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Driving apparatus and exposure apparatus
Patent number
6,493,062
Issue date
Dec 10, 2002
Canon Kabushiki Kaisha
Yukio Tokuda
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Vibration damping apparatus
Patent number
5,881,987
Issue date
Mar 16, 1999
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
VIBRATION DAMPING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...
Publication number
20190278185
Publication date
Sep 12, 2019
Canon Kabushiki Kaisha
Yoshihiro Morimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100079736
Publication date
Apr 1, 2010
Canon Kabushiki Kaisha
Hiroyuki Wada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090195767
Publication date
Aug 6, 2009
Canon Kabushiki Kaisha
Masatomi Yoshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, STRUCTURE, METHOD FOR SETTING UP APPARATUS, AND...
Publication number
20090168036
Publication date
Jul 2, 2009
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20070160356
Publication date
Jul 12, 2007
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20060023180
Publication date
Feb 2, 2006
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus
Publication number
20040137384
Publication date
Jul 15, 2004
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus
Publication number
20040057032
Publication date
Mar 25, 2004
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and method of manufacturing a semiconductor devi...
Publication number
20040057031
Publication date
Mar 25, 2004
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Anti-vibration system for exposure apparatus
Publication number
20030030779
Publication date
Feb 13, 2003
Canon Kabushiki Kaisha
Hiromichi Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRIVING APPARATUS AND EXPOSURE APPARATUS
Publication number
20020054280
Publication date
May 9, 2002
YUKIO TOKUDA
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
ANTI-VIBRATION SYSTEM FOR EXPOSURE APPARATUS
Publication number
20020012108
Publication date
Jan 31, 2002
HIROMICHI HARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY