Hiromichi Ito

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Nirasaki-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Inductively-coupled-plasma-processing apparatus
- Patent number 6,331,754
- Issue date Dec 18, 2001
- Tokyo Electron Limited
- Tsutomu Satoyoshi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate supporting table, method for producing same, and processi...
- Publication number 20050120962
- Publication date Jun 9, 2005
- Joichi Ushioda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate supporting table,method for producing same, and processin...
- Publication number 20020134511
- Publication date Sep 26, 2002
- Joichi Ushioda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...