Hiromichi KABA

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus
- Patent number 12,083,563
- Issue date Sep 10, 2024
- SCREEN Holdings Co., Ltd.
- Kazuhiko Nakazawa
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus
- Patent number 11,948,823
- Issue date Apr 2, 2024
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 11,850,623
- Issue date Dec 26, 2023
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 11,764,055
- Issue date Sep 19, 2023
- SCREEN Holdings Co., Ltd.
- Nobuyuki Shibayama
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus
- Patent number 11,521,881
- Issue date Dec 6, 2022
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,031,235
- Issue date Jun 8, 2021
- SCREEN Holdings Co., Ltd.
- Hiromichi Kaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,777,404
- Issue date Sep 15, 2020
- SCREEN Holdings Co., Ltd.
- Hiromichi Kaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding/rotating device, substrate processing apparatus i...
- Patent number 10,192,771
- Issue date Jan 29, 2019
- SCREEN Holdings Co., Ltd.
- Hiromichi Kaba
- B08 - CLEANING
Information Patent Grant
Substrate holding/rotating device, substrate processing apparatus i...
- Patent number 9,892,955
- Issue date Feb 13, 2018
- SCREEN Holdings Co., Ltd.
- Hiromichi Kaba
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230302501
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Kazuhiko NAKAZAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230290670
- Publication date Sep 14, 2023
- SCREEN Holdings Co., Ltd.
- Kazuhiko NAKAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230089805
- Publication date Mar 23, 2023
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20210086222
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20210086236
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- Kazuhiko NAKAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20210090927
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200381244
- Publication date Dec 3, 2020
- SCREEN Holdings Co., Ltd.
- Hiromichi KABA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20190035622
- Publication date Jan 31, 2019
- SCREEN Holdings Co., Ltd.
- Nobuyuki SHIBAYAMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170243735
- Publication date Aug 24, 2017
- SCREEN Holdings Co., Ltd.
- Hiromichi KABA
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDING/ROTATING DEVICE, SUBSTRATE PROCESSING APPARATUS I...
- Publication number 20170092530
- Publication date Mar 30, 2017
- SCREEN Holdings Co., Ltd.
- Hiromichi KABA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING/ROTATING DEVICE, SUBSTRATE PROCESSING APPARATUS I...
- Publication number 20170092532
- Publication date Mar 30, 2017
- SCREEN Holdings Co., Ltd.
- Hiromichi KABA
- B08 - CLEANING

Hiromichi KABA

Person

Patents Grantslast 30 patents

Substrate treating apparatus

Substrate treating apparatus

Substrate treating apparatus and substrate transporting method

Substrate processing method and substrate processing device

Substrate treating apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate holding/rotating device, substrate processing apparatus i...

Substrate holding/rotating device, substrate processing apparatus i...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE HOLDING/ROTATING DEVICE, SUBSTRATE PROCESSING APPARATUS I...

SUBSTRATE HOLDING/ROTATING DEVICE, SUBSTRATE PROCESSING APPARATUS I...