Hiromitsu Hamaguchi

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Osaka, JP

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Patents Grantslast 30 patents

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Method and apparatus for writing a pattern on a semiconductor sampl...
- Patent number 5,182,718
- Issue date Jan 26, 1993
- Matsushita Electric Industrial Co., Ltd.
- Kenji Harafuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam exposure evaluation method
- Patent number 4,998,020
- Issue date Mar 5, 1991
- Matsushita Electric Industrial Co., Ltd.
- Akio Misaka
- B82 - NANO-TECHNOLOGY