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Patent Application
DEPOSITION APPARATUS AND MANUFACTURING METHOD OF THIN FILM DEVICE
Publication number
20110111581
Publication date
May 12, 2011
SHINCRON CO., LTD.
Ichiro Shiono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
DEPOSITION APPARATUS AND MANUFACTURING METHOD OF THIN FILM DEVICE
Publication number
20110097511
Publication date
Apr 28, 2011
SHINCRON CO., LTD.
Ichiro Shiono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...