Hiromitsu MAEJIMA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and non-tr...
- Patent number 10,256,127
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Tokutarou Hayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and non-tr...
- Patent number 9,507,349
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Tokutarou Hayashi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...
- Publication number 20170018444
- Publication date Jan 19, 2017
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...
- Publication number 20130204421
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS