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last 30 patents
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Patent Grant
Fluorine-containing polymer, purification method, and radiation-sen...
Patent number
11,681,222
Issue date
Jun 20, 2023
JSR Corporation
Hiroki Nakagawa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Resin composition and method of forming resist pattern
Patent number
11,603,459
Issue date
Mar 14, 2023
JSR Corporation
Tomohiko Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resin composition and method of forming resist pattern
Patent number
11,130,856
Issue date
Sep 28, 2021
JSR Corporation
Tomohiko Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorine-containing polymer, purification method, and radiation-sen...
Patent number
11,036,133
Issue date
Jun 15, 2021
JSR Corporation
Hiroki Nakagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluorine-containing polymer, purification method, and radiation-sen...
Patent number
10,620,534
Issue date
Apr 14, 2020
JSR Corporation
Hiroki Nakagawa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Resist pattern-forming method
Patent number
10,564,546
Issue date
Feb 18, 2020
JSR Corporation
Tomohiko Sakurai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluorine-containing polymer, purification method, and radiation-sen...
Patent number
10,082,733
Issue date
Sep 25, 2018
JSR Corporation
Hiroki Nakagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation-sensitive resin composition, method for forming resist pa...
Patent number
10,048,586
Issue date
Aug 14, 2018
JSR Corporation
Yuusuke Asano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation-sensitive resin composition, polymer and method for formi...
Patent number
9,598,520
Issue date
Mar 21, 2017
JSR Corporation
Yuko Kiridoshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation-sensitive resin composition, method for forming resist pa...
Patent number
9,513,548
Issue date
Dec 6, 2016
JSR Corporation
Yuusuke Asano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluorine-containing polymer, purification method, and radiation-sen...
Patent number
9,500,950
Issue date
Nov 22, 2016
JSR Corporation
Hiroki Nakagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist composition and resist pattern-forming method
Patent number
9,268,219
Issue date
Feb 23, 2016
JSR Corporation
Hiromu Miyata
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Fluorine-containing polymer, purification method, and radiation-sen...
Patent number
9,213,236
Issue date
Dec 15, 2015
JSR Corporation
Hiroki Nakagawa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Radiation-sensitive resin composition and pattern-forming method
Patent number
9,158,196
Issue date
Oct 13, 2015
JSR Corporation
Kazuki Kasahara
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composition for forming resist underlayer film and pattern-forming...
Patent number
9,116,427
Issue date
Aug 25, 2015
JSR Corporation
Shunsuke Kurita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist pattern-forming method, resist pattern-forming radiation-sen...
Patent number
9,046,765
Issue date
Jun 2, 2015
JSR Corporation
Hiromitsu Nakashima
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Radiation-sensitive resin composition
Patent number
8,895,223
Issue date
Nov 25, 2014
JSR Corporation
Mitsuo Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Composition for formation of upper layer film, and method for forma...
Patent number
8,895,229
Issue date
Nov 25, 2014
JSR Corporation
Yukio Nishimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation-sensitive resin composition, method for forming resist pa...
Patent number
8,728,706
Issue date
May 20, 2014
JSR Corporation
Yuusuke Asano
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Fluorine-containing polymer, purification method, and radiation-sen...
Patent number
8,697,343
Issue date
Apr 15, 2014
JSR Corporation
Hiroki Nakagawa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Radiation-sensitive resin composition, polymer and compound
Patent number
8,609,321
Issue date
Dec 17, 2013
JSP Corporation
Hiromitsu Nakashima
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Radiation-sensitive resin composition, method for forming resist pa...
Patent number
8,609,318
Issue date
Dec 17, 2013
JSR Corporation
Kazuo Nakahara
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Radiation-sensitive resin composition and resist film formed using...
Patent number
8,609,319
Issue date
Dec 17, 2013
JSR Corporation
Toru Kimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lactone copolymer and radiation-sensitive resin composition
Patent number
8,597,867
Issue date
Dec 3, 2013
JSR Corporation
Hiromitsu Nakashima
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Upper layer film forming composition and method of forming photores...
Patent number
8,507,189
Issue date
Aug 13, 2013
JSR Corporation
Daita Kouno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Upper layer-forming composition and photoresist patterning method
Patent number
8,435,718
Issue date
May 7, 2013
JSR Corporation
Atsushi Nakamura
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Radiation-sensitive resin composition and compound
Patent number
8,273,521
Issue date
Sep 25, 2012
JSR Corporation
Mitsuo Sato
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Polymer and positive-tone radiation-sensitive resin composition
Patent number
8,182,977
Issue date
May 22, 2012
JSR Corporation
Norihiko Ikeda
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Upper layer-forming composition and photoresist patterning method
Patent number
8,076,053
Issue date
Dec 13, 2011
JSR Corporation
Atsushi Nakamura
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD OF FORMING RESIST PAT...
Publication number
20220299873
Publication date
Sep 22, 2022
JSR Corporation
Ryuichi NEMOTO
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND RESIST PATTERN-FORMING ME...
Publication number
20220260908
Publication date
Aug 18, 2022
JSR Corporation
Tetsurou KANEKO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SEN...
Publication number
20220137508
Publication date
May 5, 2022
JSR Corporation
Hiroki NAKAGAWA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIN COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20210388197
Publication date
Dec 16, 2021
JSR Corporation
Tomohiko SAKURAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND RESIST PATTERN-FORMING ME...
Publication number
20210389671
Publication date
Dec 16, 2021
JSR Corporation
Tetsurou KANEKO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING RESIST...
Publication number
20210364918
Publication date
Nov 25, 2021
JSR Corporation
Katsuaki Nishikori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SEN...
Publication number
20210278764
Publication date
Sep 9, 2021
JSR Corporation
Hiroki NAKAGAWA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SEN...
Publication number
20200124961
Publication date
Apr 23, 2020
JSR Corporation
Hiroki NAKAGAWA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SEN...
Publication number
20190278175
Publication date
Sep 12, 2019
JSR Corporation
Hiroki NAKAGAWA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIN COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20190249000
Publication date
Aug 15, 2019
JSR Corporation
Tomohiko SAKURAI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SEN...
Publication number
20190025695
Publication date
Jan 24, 2019
JSR Corporation
Hiroki NAKAGAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST PATTERN-FORMING METHOD
Publication number
20170329228
Publication date
Nov 16, 2017
JSR Corporation
Tomohiko SAKURAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SEN...
Publication number
20170199453
Publication date
Jul 13, 2017
JSR Corporation
Hiroki NAKAGAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PA...
Publication number
20160179003
Publication date
Jun 23, 2016
JSR Corporation
Yuusuke ASANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SEN...
Publication number
20160062237
Publication date
Mar 3, 2016
JSR Corporation
Hiroki NAKAGAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PA...
Publication number
20140212813
Publication date
Jul 31, 2014
JSR Corporation
Yuusuke ASANO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SEN...
Publication number
20140162190
Publication date
Jun 12, 2014
JSR Corporation
Hiroki NAKAGAWA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST PATTERN-FORMING METHOD, RESIST PATTERN-FORMING RADIATION-SEN...
Publication number
20140023968
Publication date
Jan 23, 2014
JSR Corporation
Hiromitsu NAKASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM AND PATTERN-FORMING...
Publication number
20130233825
Publication date
Sep 12, 2013
JSR Corporation
Shunsuke KURITA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND PATTERN-FORMING METHOD
Publication number
20130216948
Publication date
Aug 22, 2013
JSR Corporation
Kazuki KASAHARA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND COMPOUND
Publication number
20130189621
Publication date
Jul 25, 2013
JSR Corporation
Hiromitsu NAKASHIMA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
PHOTORESIST COMPOSITION AND RESIST PATTERN-FORMING METHOD
Publication number
20130089817
Publication date
Apr 11, 2013
JSR Corporation
Hiromu MIYATA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PA...
Publication number
20130022912
Publication date
Jan 24, 2013
JSR Corporation
Mitsuo SATO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND METHOD FOR FORMI...
Publication number
20120295197
Publication date
Nov 22, 2012
JSR Corporation
Yuko KIRIDOSHI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PA...
Publication number
20120237875
Publication date
Sep 20, 2012
JSR Corporation
Yuusuke ASANO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION
Publication number
20120219903
Publication date
Aug 30, 2012
JSR Corporation
Mitsuo SATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND RESIST FILM FORMED USING...
Publication number
20120082935
Publication date
Apr 5, 2012
JSR Corporation
Toru Kimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PA...
Publication number
20120034560
Publication date
Feb 9, 2012
JSR Corporation
Kazuo NAKAHARA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
UPPER LAYER-FORMING COMPOSITION AND PHOTORESIST PATTERNING METHOD
Publication number
20120028198
Publication date
Feb 2, 2012
JSR Corporation
Atsushi NAKAMURA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND POLYMER
Publication number
20110223537
Publication date
Sep 15, 2011
JSR Corporation
Takuma Ebata
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...