Hiromitsu TERAUCHI

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,831,096
- Issue date Nov 28, 2017
- Hitachi High-Technologies Corporation
- Hiromitsu Terauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,711,375
- Issue date Jul 18, 2017
- Hitachi High-Technologies Corporation
- Hiromitsu Terauchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20160211153
- Publication date Jul 21, 2016
- Hitachi High-Technologies Corporation
- Hiromitsu TERAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150371876
- Publication date Dec 24, 2015
- Hitachi High-Technologies Corporation
- Hiromitsu TERAUCHI
- H01 - BASIC ELECTRIC ELEMENTS