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Semiconductor device having MEMS
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Patent number 7,208,809
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Issue date Apr 24, 2007
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Nippon Telegraph and Telephone Corporation
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Masami Urano
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Optical switch device
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Patent number 6,912,336
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Issue date Jun 28, 2005
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Nippon Telegraph and Telephone Corporation
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Hiromu Ishii
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Micromachine manufacturing method
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Patent number 6,743,653
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Issue date Jun 1, 2004
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Nippon Telegraph and Telephone Corporation
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Yasuyuki Tanabe
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Pattern forming method
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Patent number 6,468,895
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Issue date Oct 22, 2002
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Nippon Telegraph and Telephone Corporation
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Hiromu Ishii
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H01 - BASIC ELECTRIC ELEMENTS
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