Hironobu Fujishima

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Position detection apparatus, exposure apparatus, and article manuf...
- Patent number 11,231,573
- Issue date Jan 25, 2022
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G01 - MEASURING TESTING
Information Patent Grant
Pattern forming apparatus and article manufacturing method
- Patent number 10,747,116
- Issue date Aug 18, 2020
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, pattern forming apparatus, obtaining method, d...
- Patent number 10,545,415
- Issue date Jan 28, 2020
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Computer readable storage medium including effective light source c...
- Patent number 8,502,962
- Issue date Aug 6, 2013
- Canon Kabushiki Kaisha
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CALIBRATION METHOD, DETECTION SYSTEM, EXPOSURE APPARATUS, ARTICLE M...
- Publication number 20230341786
- Publication date Oct 26, 2023
- Canon Kabushiki Kaisha
- HIRONOBU FUJISHIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUF...
- Publication number 20200319447
- Publication date Oct 8, 2020
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G01 - MEASURING TESTING
Information Patent Application
PATTERN FORMING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20190278186
- Publication date Sep 12, 2019
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, PATTERN FORMING APPARATUS, OBTAINING METHOD, D...
- Publication number 20180275535
- Publication date Sep 27, 2018
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM AND MICROSCOPE
- Publication number 20150124073
- Publication date May 7, 2015
- Hironobu Fujishima
- G02 - OPTICS
Information Patent Application
COMPUTER READABLE STORAGE MEDIUM INCLUDING EFFECTIVE LIGHT SOURCE C...
- Publication number 20110122394
- Publication date May 26, 2011
- Canon Kabushiki Kaisha
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hironobu Fujishima

Person

Patents Grantslast 30 patents

Position detection apparatus, exposure apparatus, and article manuf...

Pattern forming apparatus and article manufacturing method

Detection apparatus, pattern forming apparatus, obtaining method, d...

Computer readable storage medium including effective light source c...

Patents Applicationslast 30 patents

CALIBRATION METHOD, DETECTION SYSTEM, EXPOSURE APPARATUS, ARTICLE M...

POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUF...

PATTERN FORMING APPARATUS AND ARTICLE MANUFACTURING METHOD

DETECTION APPARATUS, PATTERN FORMING APPARATUS, OBTAINING METHOD, D...

ILLUMINATION OPTICAL SYSTEM AND MICROSCOPE

COMPUTER READABLE STORAGE MEDIUM INCLUDING EFFECTIVE LIGHT SOURCE C...