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Hironobu Ichikawa

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD
    • Publication number 20160336191
    • Publication date Nov 17, 2016
    • TOKYO ELECTRON LIMITED
    • Yusuke SAITOH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20160293439
    • Publication date Oct 6, 2016
    • TOKYO ELECTRON LIMITED
    • Yusuke Saitoh
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • Publication number 20160196981
    • Publication date Jul 7, 2016
    • TOKYO ELECTRON LIMITED
    • Takayuki Katsunuma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • Publication number 20140273486
    • Publication date Sep 18, 2014
    • TOKYO ELECTRON LIMITED
    • Takayuki Katsunuma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20140197135
    • Publication date Jul 17, 2014
    • Takayuki Katsunuma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20130267094
    • Publication date Oct 10, 2013
    • TOKYO ELECTRON LIMITED
    • Takayuki KATSUNUMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20120094495
    • Publication date Apr 19, 2012
    • TOKYO ELECTRON LIMITED
    • Masanobu Honda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING METHOD
    • Publication number 20100081287
    • Publication date Apr 1, 2010
    • TOKYO ELECTRON LIMITED
    • Masanobu HONDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20100009542
    • Publication date Jan 14, 2010
    • TOKYO ELECTRON LIMITED
    • Masanobu Honda
    • H01 - BASIC ELECTRIC ELEMENTS