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Hironobu Maeda
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Utsunomiya-shi, JP
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last 30 patents
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Patent Grant
Method of fabricating structure
Patent number
7,959,843
Issue date
Jun 14, 2011
Canon Kabushiki Kaisha
Yoshitaka Zaitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
METHOD OF FABRICATING STRUCTURE
Publication number
20090315217
Publication date
Dec 24, 2009
Canon Kabushiki Kaisha
Yoshitaka Zaitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY