Membership
Tour
Register
Log in
Hironobu MATSUMOTO
Follow
Person
Kanagawa, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam writing apparatus and method for calculating...
Patent number
10,381,196
Issue date
Aug 13, 2019
NuFlare Technology, Inc.
Hironobu Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,074,516
Issue date
Sep 11, 2018
NuFlare Technology, Inc.
Hironobu Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged particle beam lithography apparatus and multiple c...
Patent number
9,947,509
Issue date
Apr 17, 2018
NuFlare Technology, Inc.
Hironobu Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam drawing apparatus and drawing data generation...
Patent number
9,779,913
Issue date
Oct 3, 2017
NuFlare Technology, Inc.
Shigehiro Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
9,721,756
Issue date
Aug 1, 2017
NuFlare Technology, Inc.
Hironobu Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
9,478,391
Issue date
Oct 25, 2016
NuFlare Technology, Inc.
Hironobu Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
Patent number
9,437,396
Issue date
Sep 6, 2016
NuFlare Technology, Inc.
Hironobu Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
9,218,942
Issue date
Dec 22, 2015
Nuflare Technology, Inc.
Hironobu Matsumoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
Patent number
9,190,246
Issue date
Nov 17, 2015
NuFlare Technology, Inc.
Hironobu Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
9,018,602
Issue date
Apr 28, 2015
Nuflare Technology, Inc.
Hironobu Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
8,791,432
Issue date
Jul 29, 2014
Nuflare Technology, Inc.
Hironobu Matsumoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
8,759,799
Issue date
Jun 24, 2014
Nuflare Technology, Inc.
Hironobu Matsumoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20170309450
Publication date
Oct 26, 2017
NuFlare Technology, Inc.
Hironobu MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND MULTIPLE C...
Publication number
20160349626
Publication date
Dec 1, 2016
NuFlare Technology, Inc.
Hironobu MATSUMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING DATA GENERATION...
Publication number
20160284510
Publication date
Sep 29, 2016
NuFlare Technology, Inc.
Shigehiro HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20160284509
Publication date
Sep 29, 2016
NuFlare Technology, Inc.
Hironobu MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20160005569
Publication date
Jan 7, 2016
NuFlare Technology, Inc.
Hironobu MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...
Publication number
20150303029
Publication date
Oct 22, 2015
NuFlare Technology, Inc.
Hironobu MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20150279611
Publication date
Oct 1, 2015
NuFlare Technology, Inc.
Hironobu MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...
Publication number
20140346369
Publication date
Nov 27, 2014
NuFlare Technology, Inc.
Hironobu MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20140077103
Publication date
Mar 20, 2014
NuFlare Technology, Inc.
Hironobu MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20130134329
Publication date
May 30, 2013
NuFlare Technology, Inc.
Hironobu MATSUMOTO
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20120085940
Publication date
Apr 12, 2012
NuFlare Technology, Inc.
Hironobu MATSUMOTO
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20110253912
Publication date
Oct 20, 2011
NuFlare Technology, Inc.
Hironobu MATSUMOTO
B82 - NANO-TECHNOLOGY