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Hironobu Misawa

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  • Nirasaki, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,037,762
    • Issue date Jun 15, 2021
    • Tokyo Electron Limited
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20180053635
    • Publication date Feb 22, 2018
    • TOKYO ELECTRON LIMITED
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20130340937
    • Publication date Dec 26, 2013
    • TOKYO ELECTRON LIMITED
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20100243609
    • Publication date Sep 30, 2010
    • TOKYO ELECTRON LIMITED
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS