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Hironobu Umemoto
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Ishikawa, JP
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Patents Grants
last 30 patents
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Patent Grant
End point detection method, end point detection device, and gas pha...
Patent number
7,815,813
Issue date
Oct 19, 2010
Tokyo Ohka Kogyo Co., Ltd.
Kazuhisa Takao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hydrogen atom generation source in vacuum treatment apparatus, and...
Patent number
7,771,701
Issue date
Aug 10, 2010
Canon Anelva Corporation
Hironobu Umemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
End point detection method , end point detection device, and gas ph...
Publication number
20090263911
Publication date
Oct 22, 2009
TOKYO OHKA KOGYO CO., LTD.
Kazuhisa Takao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Hydrogen Atom Generation Source in Vacuum Treatment Apparatus, and...
Publication number
20090004100
Publication date
Jan 1, 2009
CANON ANELVA CORPORATION
Hironobu Umemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas phase reaction processing device
Publication number
20070048200
Publication date
Mar 1, 2007
Tokyo Ohka Kogyo Co., Ltd.
Kazuhisa Takao
C30 - CRYSTAL GROWTH