Hironobu Yabuta

Person

Shizuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Foil trap and light source apparatus including the same
- Patent number 11,822,258
- Issue date Nov 21, 2023
- Ushio Denki Kabushiki Kaisha
- Hironobu Yabuta
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source device
- Patent number 11,774,856
- Issue date Oct 3, 2023
- USHIO DENKI KABUSHIKI KAISHA
- Hajime Kikuiri
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Foil trap and light source device using such foil trap
- Patent number 9,599,812
- Issue date Mar 21, 2017
- Ushio Denki Kabushiki Kaisha
- Christof Metzmacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source apparatus
- Patent number 9,572,240
- Issue date Feb 14, 2017
- Ushio Denki Kabushiki Kaisha
- Gota Niimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet radiation source device
- Patent number 7,705,334
- Issue date Apr 27, 2010
- Ushio Denki Kabushiki Kaisha
- Hironobu Yabuta
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ROTARY FOIL TRAP AND LIGHT SOURCE DEVICE
- Publication number 20240004317
- Publication date Jan 4, 2024
- Ushio Denki Kabushiki Kaisha
- Hironobu Yabuta
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FOIL TRAP COVER DEVICE AND DEBRIS REDUCTION APPARATUS
- Publication number 20230418171
- Publication date Dec 28, 2023
- Ushio Denki Kabushiki Kaisha
- Hironobu Yabuta
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEBRIS MITIGATION DEVICE AND LIGHT SOURCE APPARATUS INCLUDING THE SAME
- Publication number 20230418170
- Publication date Dec 28, 2023
- Ushio Denki Kabushiki Kaisha
- Noritaka Ashizawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND PROTECTION METHOD FOR R...
- Publication number 20230324815
- Publication date Oct 12, 2023
- Ushio Denki Kabushiki Kaisha
- Hironobu YABUTA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20230288821
- Publication date Sep 14, 2023
- Ushio Denki Kabushiki Kaisha
- Noritaka ASHIZAWA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
- Publication number 20230213865
- Publication date Jul 6, 2023
- Ushio Denki Kabushiki Kaisha
- Hajime KIKUIRI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FOIL TRAP AND LIGHT SOURCE APPARATUS INCLUDING THE SAME
- Publication number 20220291597
- Publication date Sep 15, 2022
- Ushio Denki Kabushiki Kaisha
- Hironobu Yabuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE APPARATUS
- Publication number 20160330826
- Publication date Nov 10, 2016
- Ushio Denki Kabushiki Kaisha
- Gota NIIMI
- F21 - LIGHTING
Information Patent Application
FOIL TRAP AND LIGHT SOURCE DEVICE USING SUCH FOIL TRAP
- Publication number 20160195714
- Publication date Jul 7, 2016
- Ushio Denki Kabushiki Kaisha
- Christof METZMACHER
- G02 - OPTICS
Information Patent Application
Extreme ultraviolet radiation source device
- Publication number 20080099699
- Publication date May 1, 2008
- Ushio Denki Kabushiki Kaisha
- Hironobu Yabuta
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Hironobu Yabuta

Person

Patents Grantslast 30 patents

Foil trap and light source apparatus including the same

Extreme ultraviolet light source device

Foil trap and light source device using such foil trap

Light source apparatus

Extreme ultraviolet radiation source device

Patents Applicationslast 30 patents

ROTARY FOIL TRAP AND LIGHT SOURCE DEVICE

FOIL TRAP COVER DEVICE AND DEBRIS REDUCTION APPARATUS

DEBRIS MITIGATION DEVICE AND LIGHT SOURCE APPARATUS INCLUDING THE SAME

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND PROTECTION METHOD FOR R...

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

FOIL TRAP AND LIGHT SOURCE APPARATUS INCLUDING THE SAME

LIGHT SOURCE APPARATUS

FOIL TRAP AND LIGHT SOURCE DEVICE USING SUCH FOIL TRAP

Extreme ultraviolet radiation source device