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Hironobu Yabuta
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Himeji-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Device for producing extreme UV radiation
Patent number
7,479,645
Issue date
Jan 20, 2009
Ushiodenki Kabushiki Kaisha
Hironobu Yabuta
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme UV radiation source device and method for eliminating debri...
Patent number
7,459,708
Issue date
Dec 2, 2008
Ushiodenki Kabushiki Kaisha
Masaki Inoue
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
DEVICE FOR PRODUCING EXTREME UV RADIATION
Publication number
20070018119
Publication date
Jan 25, 2007
Ushiodenki Kabushiki Kaisha
Hironobu Yabuta
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme UV radiation source device and method for eliminating debri...
Publication number
20060163500
Publication date
Jul 27, 2006
Ushiodenki Kabushiki Kaisha
Masaki Inoue
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR