Hironori Kusumoto

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,482,435
- Issue date Oct 25, 2022
- HITACHI HIGH-TECH CORPORATION
- Masatoshi Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and sample stage thereof
- Patent number 10,796,890
- Issue date Oct 6, 2020
- HITACHI HIGH-TECH CORPORATION
- Hironori Kusumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and sample stage thereof
- Patent number 10,141,165
- Issue date Nov 27, 2018
- Hitachi High-Technologies Corporation
- Hironori Kusumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190393058
- Publication date Dec 26, 2019
- Hitachi High-Technologies Corporation
- Masatoshi Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF
- Publication number 20190057846
- Publication date Feb 21, 2019
- Hitachi High-Technologies Corporation
- Hironori KUSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF
- Publication number 20160155617
- Publication date Jun 2, 2016
- Hitachi High-Technologies Corporation
- Hironori KUSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20160027618
- Publication date Jan 28, 2016
- Hitachi High-Technologies Corporation
- Masatoshi Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150214083
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Masatoshi Kawakami
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF
- Publication number 20140216657
- Publication date Aug 7, 2014
- Hitachi High-Technologies Corporation
- Hironori KUSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120012252
- Publication date Jan 19, 2012
- Hironori Kusumoto
- H01 - BASIC ELECTRIC ELEMENTS

Hironori Kusumoto

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Plasma processing apparatus and sample stage thereof

Plasma processing apparatus and sample stage thereof

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF

PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF

PLASMA PROCESSING APPARATUS