Hironori Maeda

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Detection method, detection apparatus, lithography apparatus, and a...
- Patent number 12,061,079
- Issue date Aug 13, 2024
- Canon Kabushiki Kaisha
- Masaharu Kajitani
- G01 - MEASURING TESTING
Information Patent Grant
Detection apparatus, exposure apparatus, and article manufacturing...
- Patent number 11,333,986
- Issue date May 17, 2022
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, exposure apparatus, and article manuf...
- Patent number 11,231,573
- Issue date Jan 25, 2022
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G01 - MEASURING TESTING
Information Patent Grant
Measurement apparatus, exposure apparatus, and method of manufactur...
- Patent number 11,169,452
- Issue date Nov 9, 2021
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement apparatus, exposure apparatus, and method of manufactur...
- Patent number 10,656,541
- Issue date May 19, 2020
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, and method of manufacturing article
- Patent number 9,939,741
- Issue date Apr 10, 2018
- Canon Kabushiki Kaisha
- Hironori Maeda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Detection apparatus, measurement apparatus, lithography apparatus,...
- Patent number 9,869,936
- Issue date Jan 16, 2018
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography apparatus and device manufacturing method therefor
- Patent number 9,718,234
- Issue date Aug 1, 2017
- Canon Kabushiki Kaisha
- Hironori Maeda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and device manufacturing method
- Patent number 9,645,514
- Issue date May 9, 2017
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Position detector, position detection method, exposure apparatus, a...
- Patent number 9,639,000
- Issue date May 2, 2017
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 9,535,321
- Issue date Jan 3, 2017
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus with detection apparatus for detection of upper...
- Patent number 9,523,927
- Issue date Dec 20, 2016
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection device, exposure apparatus, and device manufacturing meth...
- Patent number 9,400,436
- Issue date Jul 26, 2016
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Detection apparatus, exposure apparatus, device fabrication method...
- Patent number 9,291,921
- Issue date Mar 22, 2016
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 9,283,720
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus, imprint method, and device manufacturing method
- Patent number 9,188,855
- Issue date Nov 17, 2015
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Detector, imprint apparatus, and article manufacturing method
- Patent number 8,922,786
- Issue date Dec 30, 2014
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G01 - MEASURING TESTING
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 8,842,294
- Issue date Sep 23, 2014
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING
Information Patent Grant
Position detector, position detection method, exposure apparatus, a...
- Patent number 8,810,772
- Issue date Aug 19, 2014
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Aberration measurement method, exposure apparatus, and device manuf...
- Patent number 8,345,220
- Issue date Jan 1, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Aberration measurement method, exposure apparatus, and device manuf...
- Patent number 8,345,221
- Issue date Jan 1, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Adjustment method for position detection apparatus, exposure appara...
- Patent number 8,049,891
- Issue date Nov 1, 2011
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 7,580,116
- Issue date Aug 25, 2009
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETECTION METHOD, DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND A...
- Publication number 20230273016
- Publication date Aug 31, 2023
- Canon Kabushiki Kaisha
- MASAHARU KAJITANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, DETECTION METHOD, EXPOSURE APPARATUS AND ARTIC...
- Publication number 20230229095
- Publication date Jul 20, 2023
- Canon Kabushiki Kaisha
- HIRONORI MAEDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20210286275
- Publication date Sep 16, 2021
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUF...
- Publication number 20200319447
- Publication date Oct 8, 2020
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20200249589
- Publication date Aug 6, 2020
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20190346774
- Publication date Nov 14, 2019
- Canon Kabushiki Kaisha
- Hironori Maeda
- G02 - OPTICS
Information Patent Application
DETECTION APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...
- Publication number 20160320710
- Publication date Nov 3, 2016
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20160033884
- Publication date Feb 4, 2016
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150158238
- Publication date Jun 11, 2015
- Canon Kabushiki Kaisha
- Hironori MAEDA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20140346694
- Publication date Nov 27, 2014
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTOR, POSITION DETECTION METHOD, EXPOSURE APPARATUS, A...
- Publication number 20140320839
- Publication date Oct 30, 2014
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
DETECTION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METH...
- Publication number 20140111788
- Publication date Apr 24, 2014
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
MEASURING METHOD, AND EXPOSURE METHOD AND APPARATUS
- Publication number 20130321811
- Publication date Dec 5, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURIN...
- Publication number 20130230798
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD THEREFOR
- Publication number 20130161868
- Publication date Jun 27, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Application
DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130100459
- Publication date Apr 25, 2013
- Canon Kabushiki Kaisha
- Toshiki Iwai
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20120328725
- Publication date Dec 27, 2012
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
DETECTION APPARATUS, EXPOSURE APPARATUS, DEVICE FABRICATION METHOD...
- Publication number 20120307226
- Publication date Dec 6, 2012
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20120292801
- Publication date Nov 22, 2012
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Application
ABERRATION MEASUREMENT METHOD, EXPOSURE APPARATUS, AND DEVICE MANUF...
- Publication number 20120206701
- Publication date Aug 16, 2012
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20110198769
- Publication date Aug 18, 2011
- Canon Kabushiki Kaisha
- Hironori MAEDA
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DE...
- Publication number 20090231569
- Publication date Sep 17, 2009
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTOR, POSITION DETECTION METHOD, EXPOSURE APPARATUS, A...
- Publication number 20090115985
- Publication date May 7, 2009
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
ADJUSTMENT METHOD FOR POSITION DETECTION APPARATUS, EXPOSURE APPARA...
- Publication number 20090015836
- Publication date Jan 15, 2009
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20090015813
- Publication date Jan 15, 2009
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ABERRATION MEASUREMENT METHOD, EXPOSURE APPARATUS, AND DEVICE MANUF...
- Publication number 20080239271
- Publication date Oct 2, 2008
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING

Hironori Maeda

Person

Patents Grantslast 30 patents

Detection method, detection apparatus, lithography apparatus, and a...

Detection apparatus, exposure apparatus, and article manufacturing...

Position detection apparatus, exposure apparatus, and article manuf...

Measurement apparatus, exposure apparatus, and method of manufactur...

Measurement apparatus, exposure apparatus, and method of manufactur...

Lithography apparatus, and method of manufacturing article

Detection apparatus, measurement apparatus, lithography apparatus,...

Imprint lithography apparatus and device manufacturing method therefor

Imprint apparatus, imprint method, and device manufacturing method

Position detector, position detection method, exposure apparatus, a...

Imprint apparatus and article manufacturing method

Exposure apparatus with detection apparatus for detection of upper...

Detection device, exposure apparatus, and device manufacturing meth...

Detection apparatus, exposure apparatus, device fabrication method...

Position detection apparatus, imprint apparatus, and position detec...

Imprint apparatus, imprint method, and device manufacturing method

Detector, imprint apparatus, and article manufacturing method

Position detection apparatus, imprint apparatus, and position detec...

Position detector, position detection method, exposure apparatus, a...

Aberration measurement method, exposure apparatus, and device manuf...

Aberration measurement method, exposure apparatus, and device manuf...

Adjustment method for position detection apparatus, exposure appara...

Exposure apparatus and device fabrication method

Patents Applicationslast 30 patents

DETECTION METHOD, DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND A...

DETECTION APPARATUS, DETECTION METHOD, EXPOSURE APPARATUS AND ARTIC...

DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING...

POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUF...

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...

DETECTION APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...

IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

POSITION DETECTOR, POSITION DETECTION METHOD, EXPOSURE APPARATUS, A...

DETECTION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METH...

MEASURING METHOD, AND EXPOSURE METHOD AND APPARATUS

DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURIN...

IMPRINT LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD THEREFOR

DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

DETECTION APPARATUS, EXPOSURE APPARATUS, DEVICE FABRICATION METHOD...

IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD

ABERRATION MEASUREMENT METHOD, EXPOSURE APPARATUS, AND DEVICE MANUF...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DE...

POSITION DETECTOR, POSITION DETECTION METHOD, EXPOSURE APPARATUS, A...

ADJUSTMENT METHOD FOR POSITION DETECTION APPARATUS, EXPOSURE APPARA...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

ABERRATION MEASUREMENT METHOD, EXPOSURE APPARATUS, AND DEVICE MANUF...