Hironori Mizoguchi

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, resist pattern forming method, and storage medium
- Patent number 10,101,669
- Issue date Oct 16, 2018
- Tokyo Electron Limited
- Seiji Nagahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light irradiation apparatus
- Patent number 9,899,243
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM
- Publication number 20160327869
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT IRRADIATION APPARATUS
- Publication number 20160170316
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- H01 - BASIC ELECTRIC ELEMENTS