Hironori Ogawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Information transmission system using bell
- Patent number 11,875,668
- Issue date Jan 16, 2024
- Koizumi Factory Corporation
- Toshihiro Koizumi
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Grant
Vibration damping system for charged particle beam apparatus
- Patent number 11,664,185
- Issue date May 30, 2023
- HITACHI HIGH-TECH CORPORATION
- Jun Etoh
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Stage device, charged particle beam apparatus, and vacuum apparatus
- Patent number 11,417,496
- Issue date Aug 16, 2022
- Hitachi, Ltd.
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection apparatus and wafer inspection method
- Patent number 11,342,211
- Issue date May 24, 2022
- HITACHI HIGH-TECH CORPORATION
- Akira Doi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus, sample alignment method of charged...
- Patent number 11,342,156
- Issue date May 24, 2022
- HITACHI HIGH-TECH CORPORATION
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and charged particle beam apparatus
- Patent number 11,049,687
- Issue date Jun 29, 2021
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Stage apparatus, and charged particle beam apparatus
- Patent number 10,879,033
- Issue date Dec 29, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira Nishioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus comprising a controller to set cont...
- Patent number 10,804,067
- Issue date Oct 13, 2020
- HITACHI HIGH-TECH CORPORATION
- Takanori Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,770,259
- Issue date Sep 8, 2020
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,658,151
- Issue date May 19, 2020
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,600,614
- Issue date Mar 24, 2020
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration-suppressing mechanism to be attached to charged particle...
- Patent number 10,591,018
- Issue date Mar 17, 2020
- Hitachi High-Technologies Corporation
- Hiroki Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam device
- Patent number 10,586,676
- Issue date Mar 10, 2020
- Hitachi High-Technologies Corporation
- Takanori Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and charged particle beam apparatus
- Patent number 10,366,912
- Issue date Jul 30, 2019
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Frequency-characteristics measurement method and positioning contro...
- Patent number 10,296,015
- Issue date May 21, 2019
- Hitachi, Ltd.
- Masaki Odai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Charged particle beam apparatus and sample elevating apparatus
- Patent number 10,153,128
- Issue date Dec 11, 2018
- Hitachi High-Technologies Corporation
- Masakazu Sugaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus with braking system for lens, beam, or vibration co...
- Patent number 9,905,393
- Issue date Feb 27, 2018
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning control device
- Patent number 9,673,021
- Issue date Jun 6, 2017
- Hitachi, Ltd.
- Hironori Ogawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage device and charged particle beam apparatus using the stage de...
- Patent number 9,627,173
- Issue date Apr 18, 2017
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, stage controlling method, and stag...
- Patent number 9,502,208
- Issue date Nov 22, 2016
- Hitachi High-Technologies Corporation
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample positioning apparatus, sample stage, and charged particle be...
- Patent number 8,946,652
- Issue date Feb 3, 2015
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device
- Patent number 8,823,309
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen stage apparatus and specimen stage positioning control method
- Patent number 8,076,651
- Issue date Dec 13, 2011
- Hitachi High-Technologies Corporation
- Masahiro Koyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Stage Device, Charged Particle Beam Device, and Vacuum Device
- Publication number 20240258063
- Publication date Aug 1, 2024
- Hitachi High-Tech Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND OPTICAL INSPE...
- Publication number 20230343622
- Publication date Oct 26, 2023
- HITACHI HIGH-TECH CORPORATION
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20230215684
- Publication date Jul 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20230137117
- Publication date May 4, 2023
- HITACHI HIGH-TECH CORPORATION
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Vibration-Suppressing Mechanism
- Publication number 20230035686
- Publication date Feb 2, 2023
- Hitachi High-Tech Corporation
- Hiroki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION DAMPING SYSTEM FOR CHARGED PARTICLE BEAM APPARATUS
- Publication number 20220208505
- Publication date Jun 30, 2022
- HITACHI HIGH-TECH CORPORATION
- Jun ETOH
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Stage Movement Control Apparatus and Charged Particle Beam System
- Publication number 20220148845
- Publication date May 12, 2022
- Hitachi High-Tech Corporation
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION TRANSMISSION SYSTEM USING BELL
- Publication number 20210335105
- Publication date Oct 28, 2021
- Koizumi Factory Corporation
- Toshihiro KOIZUMI
- G08 - SIGNALLING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, SAMPLE ALIGNMENT METHOD OF CHARGED...
- Publication number 20210265129
- Publication date Aug 26, 2021
- HITACHI HIGH-TECH CORPORATION
- Hironori OGAWA
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION APPARATUS AND WAFER INSPECTION METHOD
- Publication number 20210118710
- Publication date Apr 22, 2021
- HITACHI HIGH-TECH CORPORATION
- Akira DOI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Stage Device, Charged Particle Beam Apparatus, and Vacuum Apparatus
- Publication number 20210027978
- Publication date Jan 28, 2021
- Hitachi, Ltd
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200176217
- Publication date Jun 4, 2020
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190378678
- Publication date Dec 12, 2019
- Hitachi High-Technologies Corporation
- Akira NISHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190259567
- Publication date Aug 22, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190252151
- Publication date Aug 15, 2019
- Hitachi High-Technologies Corporation
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190228947
- Publication date Jul 25, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION-SUPPRESSING MECHANISM TO BE ATTACHED TO CHARGED PARTICLE...
- Publication number 20190145490
- Publication date May 16, 2019
- Hitachi High-Technologies Corporation
- Hiroki TAKAHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20190108970
- Publication date Apr 11, 2019
- Hitachi High-Technologies Corporation
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190103246
- Publication date Apr 4, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Apparatus and Charged Particle Beam Apparatus
- Publication number 20180247855
- Publication date Aug 30, 2018
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND SAMPLE ELEVATING APPARATUS
- Publication number 20180138009
- Publication date May 17, 2018
- Hitachi High-Technologies Corporation
- Masakazu SUGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...
- Publication number 20160284506
- Publication date Sep 29, 2016
- Hitachi High-Technologies Corporation
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Frequency-Characteristics Measurement Method and Positioning Contro...
- Publication number 20160246305
- Publication date Aug 25, 2016
- Hitachi, Ltd
- Masaki ODAI
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Apparatus, Stage Controlling Method, and Stag...
- Publication number 20160005568
- Publication date Jan 7, 2016
- Hitachi High-Technologies Corporation
- Masaki MIZUOCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIONING CONTROL DEVICE
- Publication number 20150279613
- Publication date Oct 1, 2015
- Hitachi, Ltd
- Hironori OGAWA
- G01 - MEASURING TESTING
Information Patent Application
Stage Device and Charged Particle Beam Apparatus Using the Stage De...
- Publication number 20150248991
- Publication date Sep 3, 2015
- Hironori OGAWA
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...
- Publication number 20140312246
- Publication date Oct 23, 2014
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140042338
- Publication date Feb 13, 2014
- Hitachi High-Technologies Corporation
- Nobuo Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Device
- Publication number 20120145920
- Publication date Jun 14, 2012
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD
- Publication number 20090250625
- Publication date Oct 8, 2009
- Masahiro KOYAMA
- H01 - BASIC ELECTRIC ELEMENTS

Hironori Ogawa

Person

Patents Grantslast 30 patents

Information transmission system using bell

Vibration damping system for charged particle beam apparatus

Stage device, charged particle beam apparatus, and vacuum apparatus

Wafer inspection apparatus and wafer inspection method

Charged particle beam apparatus, sample alignment method of charged...

Stage apparatus and charged particle beam apparatus

Stage apparatus, and charged particle beam apparatus

Charged particle beam apparatus comprising a controller to set cont...

Stage device and charged particle beam device

Stage device and charged particle beam device

Stage device and charged particle beam device

Vibration-suppressing mechanism to be attached to charged particle...

Charged particle beam device

Stage apparatus and charged particle beam apparatus

Frequency-characteristics measurement method and positioning contro...

Charged particle beam apparatus and sample elevating apparatus

Stage apparatus with braking system for lens, beam, or vibration co...

Positioning control device

Stage device and charged particle beam apparatus using the stage de...

Charged particle beam apparatus, stage controlling method, and stag...

Sample positioning apparatus, sample stage, and charged particle be...

Stage device

Specimen stage apparatus and specimen stage positioning control method

Patents Applicationslast 30 patents

Stage Device, Charged Particle Beam Device, and Vacuum Device

STAGE APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND OPTICAL INSPE...

STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE

Charged Particle Beam Device

Charged Particle Beam Device and Vibration-Suppressing Mechanism

VIBRATION DAMPING SYSTEM FOR CHARGED PARTICLE BEAM APPARATUS

Stage Movement Control Apparatus and Charged Particle Beam System

INFORMATION TRANSMISSION SYSTEM USING BELL

CHARGED PARTICLE BEAM APPARATUS, SAMPLE ALIGNMENT METHOD OF CHARGED...

WAFER INSPECTION APPARATUS AND WAFER INSPECTION METHOD

Stage Device, Charged Particle Beam Apparatus, and Vacuum Apparatus

STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS

STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM APPARATUS

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

VIBRATION-SUPPRESSING MECHANISM TO BE ATTACHED TO CHARGED PARTICLE...

CHARGED PARTICLE BEAM DEVICE

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

Stage Apparatus and Charged Particle Beam Apparatus

CHARGED PARTICLE BEAM APPARATUS AND SAMPLE ELEVATING APPARATUS

Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...

Frequency-Characteristics Measurement Method and Positioning Contro...

Charged Particle Beam Apparatus, Stage Controlling Method, and Stag...

POSITIONING CONTROL DEVICE

Stage Device and Charged Particle Beam Apparatus Using the Stage De...

SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...

STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS

Stage Device

SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD