Hironori YAGI

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas supply device, gas supply method and film forming method
- Patent number 11,155,923
- Issue date Oct 26, 2021
- Tokyo Electron Limited
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply method and film forming method
- Patent number 10,870,919
- Issue date Dec 22, 2020
- Tokyo Electron Limited
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material gas supply apparatus and film forming apparatus
- Patent number 10,612,143
- Issue date Apr 7, 2020
- Tokyo Electron Limited
- Eiichi Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material gas supply apparatus, raw material gas supply method a...
- Patent number 10,385,457
- Issue date Aug 20, 2019
- Tokyo Electron Limited
- Hironori Yagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material gas supply apparatus, raw material gas supply method a...
- Patent number 10,256,101
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Hironori Yagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trap mechanism, exhaust system, and film formation device
- Patent number 10,036,090
- Issue date Jul 31, 2018
- Tokyo Electron Limited
- Eiichi Komori
- B08 - CLEANING
Information Patent Grant
Thermal treatment method and apparatus
- Patent number 6,473,993
- Issue date Nov 5, 2002
- Tokyo Electron Limited
- Yasushi Yagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating apparatus, and processing apparatus
- Patent number 6,121,579
- Issue date Sep 19, 2000
- Tokyo Electron Limited
- Kazutsugu Aoki
- C30 - CRYSTAL GROWTH
Information Patent Grant
Single wafer heat treatment apparatus
- Patent number 5,938,850
- Issue date Aug 17, 1999
- Tokyo Electron Limited
- Junichi Arami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 5,591,269
- Issue date Jan 7, 1997
- Tokyo Electron Limited
- Junichi Arami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY DEVICE, GAS SUPPLY METHOD AND FILM FORMING METHOD
- Publication number 20180251894
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY DEVICE, GAS SUPPLY METHOD AND FILM FORMING METHOD
- Publication number 20180251898
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY APPARATUS, RAW MATERIAL GAS SUPPLY METHOD A...
- Publication number 20170159175
- Publication date Jun 8, 2017
- TOKYO ELECTRON LIMITED
- Hironori YAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY APPARATUS, RAW MATERIAL GAS SUPPLY METHOD A...
- Publication number 20170092549
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Hironori YAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS
- Publication number 20160273101
- Publication date Sep 22, 2016
- TOKYO ELECTRON LIMITED
- Eiichi KOMORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Trap Mechanism, Exhaust System, and Film Formation Device
- Publication number 20150047565
- Publication date Feb 19, 2015
- TOKYO ELECTRON LIMITED
- Eiichi Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hironori YAGI

Person

Patents Grantslast 30 patents

Gas supply device, gas supply method and film forming method

Gas supply method and film forming method

Raw material gas supply apparatus and film forming apparatus

Raw material gas supply apparatus, raw material gas supply method a...

Raw material gas supply apparatus, raw material gas supply method a...

Trap mechanism, exhaust system, and film formation device

Thermal treatment method and apparatus

Heating apparatus, and processing apparatus

Single wafer heat treatment apparatus

Vacuum processing apparatus

Patents Applicationslast 30 patents

GAS SUPPLY DEVICE, GAS SUPPLY METHOD AND FILM FORMING METHOD

GAS SUPPLY DEVICE, GAS SUPPLY METHOD AND FILM FORMING METHOD

RAW MATERIAL GAS SUPPLY APPARATUS, RAW MATERIAL GAS SUPPLY METHOD A...

RAW MATERIAL GAS SUPPLY APPARATUS, RAW MATERIAL GAS SUPPLY METHOD A...

RAW MATERIAL GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS

Trap Mechanism, Exhaust System, and Film Formation Device