Membership
Tour
Register
Log in
Hiroo Hongo
Follow
Person
Stuttgart, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Alignment mark for electron beam lithography
Patent number
6,424,052
Issue date
Jul 23, 2002
Tokyo Institute of Technology
Yasuyuki Miyamoto
H01 - BASIC ELECTRIC ELEMENTS