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Hiroo Ono

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing device
    • Patent number 7,338,576
    • Issue date Mar 4, 2008
    • Tokyo Electron Limited
    • Hiroo Ono
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Magnetron plasma processing apparatus
    • Patent number 6,764,575
    • Issue date Jul 20, 2004
    • Tokyo Electron Limited
    • Tomomi Yamasaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma process device
    • Patent number 6,014,943
    • Issue date Jan 18, 2000
    • Tokyo Electron Limited
    • Junichi Arami
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Load-lock unit and wafer transfer system
    • Patent number 5,435,683
    • Issue date Jul 25, 1995
    • Tokyo Electron Limited
    • Tetsu Oosawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Load-lock unit and wafer transfer system
    • Patent number 5,405,230
    • Issue date Apr 11, 1995
    • Tokyo Electron Limited
    • Hiroo Ono
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion implantation system
    • Patent number 5,343,047
    • Issue date Aug 30, 1994
    • Tokyo Electron Limited
    • Hiroo Ono
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Load-lock unit and wafer transfer system
    • Patent number 5,340,261
    • Issue date Aug 23, 1994
    • Tokyo Electron Limited
    • Tetsu Oosawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents