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Hiroshi Akiyama
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Hitachinaka, JP
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last 30 patents
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Patent Grant
Contamination inspection method and contamination inspection device
Patent number
9,176,075
Issue date
Nov 3, 2015
Hitachi High-Technologies Corporation
Masanori Gunji
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
CONTAMINATION INSPECTION METHOD AND CONTAMINATION INSPECTION DEVICE
Publication number
20120147364
Publication date
Jun 14, 2012
Masanori Gunji
G01 - MEASURING TESTING