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Hiroshi Aoi
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Annaka-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for making an optical waveguide substrate
Patent number
6,436,728
Issue date
Aug 20, 2002
Shin-Etsu Chemical Co., Ltd.
Shinji Makikawa
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
Manufacture of optical waveguide substrate
Publication number
20020020194
Publication date
Feb 21, 2002
SHIN-ETSU CHEMICAL CO., LTD.
Shinji Makikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Making method of optical waveguide substrate
Publication number
20010034074
Publication date
Oct 25, 2001
Shinji Makikawa
C30 - CRYSTAL GROWTH
Information
Patent Application
Silicon surface oxidation device and method of fabricating optical...
Publication number
20010022094
Publication date
Sep 20, 2001
Shinji Makikawa
C30 - CRYSTAL GROWTH