Hiroshi Arima

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Developing apparatus, developing method, and storage medium
- Patent number 8,398,319
- Issue date Mar 19, 2013
- Tokyo Electron Limited
- Hiroshi Arima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 8,337,104
- Issue date Dec 25, 2012
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 8,333,522
- Issue date Dec 18, 2012
- Tokyo Electron Limited
- Hiroshi Arima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, developing method and non-transit...
- Patent number 8,262,300
- Issue date Sep 11, 2012
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS AND STORAGE...
- Publication number 20120111373
- Publication date May 10, 2012
- TOKYO ELECTRON LIMITED
- Hiroshi ARIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20110200953
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Arima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, DEVELOPING METHOD AND NON-TRANSIT...
- Publication number 20110200321
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20110200952
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD, COATING...
- Publication number 20100233638
- Publication date Sep 16, 2010
- TOKYO ELECTRON LIMITED
- Yuichi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD, AND STORAGE MEDIUM
- Publication number 20100233637
- Publication date Sep 16, 2010
- TOKYO ELECTRON LIMITED
- Hiroshi ARIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hiroshi Arima

Person

Patents Grantslast 30 patents

Developing apparatus, developing method, and storage medium

Developing apparatus, developing method and storage medium

Developing apparatus, developing method and storage medium

Coating and developing apparatus, developing method and non-transit...

Patents Applicationslast 30 patents

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS AND STORAGE...

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

COATING AND DEVELOPING APPARATUS, DEVELOPING METHOD AND NON-TRANSIT...

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD, COATING...

DEVELOPING APPARATUS, DEVELOPING METHOD, AND STORAGE MEDIUM