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Wet process gas treatment apparatus
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Patent number 7,288,140
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Issue date Oct 30, 2007
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Canon Kabushiki Kaisha
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Hiroshi Echizen
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Long-Term sputtering method
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Patent number 6,860,974
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Issue date Mar 1, 2005
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Canon Kabushiki Kaisha
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Hiroshi Echizen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering method and sputtering apparatus
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Patent number 6,783,640
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Issue date Aug 31, 2004
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Canon Kabushiki Kaisha
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Toshihiro Yamashita
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film forming method
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Patent number 6,338,872
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Issue date Jan 15, 2002
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Canon Kabushiki Kaisha
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Takehito Yoshino
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film forming apparatus
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Patent number 6,273,955
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Issue date Aug 14, 2001
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Canon Kabushiki Kaisha
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Takehito Yoshino
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Deposited film forming apparatus
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Patent number 6,113,732
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Issue date Sep 5, 2000
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Canon Kabushiki Kaisha
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Kohei Yoshida
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Microwave plasma processing apparatus
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Patent number 5,700,326
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Issue date Dec 23, 1997
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Canon Kabushiki Kaisha
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Kazumasa Takatsu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Exposure method and apparatus
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Patent number 5,171,965
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Issue date Dec 15, 1992
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Canon Kabushiki Kaisha
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Akiyoshi Suzuki
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method for forming deposition film
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Patent number 4,626,449
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Issue date Dec 2, 1986
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Canon Kabushiki Kaisha
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Yutaka Hirai
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...