Hiroshi Higashi

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer surface observing method and apparatus
- Patent number 8,577,119
- Issue date Nov 5, 2013
- Hitachi High-Technologies Corporation
- Hiroshi Higashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Wafer surface observing method and apparatus
- Publication number 20070269100
- Publication date Nov 22, 2007
- Hiroshi Higashi
- G01 - MEASURING TESTING