Hiroshi Iizuka

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Plasma reactor having a function of tuning low frequency RF power d...
- Patent number 11,830,747
- Issue date Nov 28, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Switchable matching network and an inductively coupled plasma proce...
- Patent number 10,685,811
- Issue date Jun 16, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
High frequency power supply device and high frequency power supplyi...
- Patent number 10,201,069
- Issue date Feb 5, 2019
- Pearl Kogyo Co., Ltd.
- Eiich Hayano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multiple frequency plasma chamber, switchable RF system, and proces...
- Patent number 7,503,996
- Issue date Mar 17, 2009
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Jinyuan Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Temperature Control Apparatus for Semiconductor Processing Equipmen...
- Publication number 20200211873
- Publication date Jul 2, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHABLE MATCHING NETWORK AND AN INDUCTIVELY COUPLED PLASMA PROCE...
- Publication number 20200090908
- Publication date Mar 19, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Kui Zhao
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PLASMA REACTOR HAVING A FUNCTION OF TUNING LOW FREQUENCY RF POWER D...
- Publication number 20190206703
- Publication date Jul 4, 2019
- Advanced Micro-Fabrication Equipment Inc, China
- Kui ZHAO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH FREQUENCY POWER SUPPLY DEVICE AND HIGH FREQUENCY POWER SUPPLYI...
- Publication number 20150289355
- Publication date Oct 8, 2015
- PEARL KOGYO CO., LTD.
- Eiich Hayano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTIPLE FREQUENCY PLASMA CHAMBER, SWITCHABLE RF SYSTEM, AND PROCES...
- Publication number 20080251207
- Publication date Oct 16, 2008
- ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA,
- Jinyuan Chen
- H03 - BASIC ELECTRONIC CIRCUITRY