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Hiroshi Inazumachi

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 8,284,538
    • Issue date Oct 9, 2012
    • Tokyo Electron Limited
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 8,264,813
    • Issue date Sep 11, 2012
    • Sumitomo Osaka Cement Co., Ltd.
    • Hiroshi Inazumachi
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 7,619,870
    • Issue date Nov 17, 2009
    • Tokyo Electron Limited
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Chucking apparatus and production method for the same
    • Patent number 6,863,281
    • Issue date Mar 8, 2005
    • Sumitomo Osaka Cement Co., Ltd.
    • Kazunori Endou
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Susceptor device
    • Patent number 6,838,646
    • Issue date Jan 4, 2005
    • Sumitomo Osaka Cement Co., Ltd.
    • Hiroshi Inazumachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Susceptor and manufacturing method thereof
    • Patent number 6,693,789
    • Issue date Feb 17, 2004
    • Sumitomo Osaka Cement Co., Ltd.
    • Hiroshi Inazumachi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20100002354
    • Publication date Jan 7, 2010
    • Hiroshi Inazumachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20080062610
    • Publication date Mar 13, 2008
    • Shinji HIMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20080062609
    • Publication date Mar 13, 2008
    • Shinji HIMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20080062611
    • Publication date Mar 13, 2008
    • Shinji HIMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20080037195
    • Publication date Feb 14, 2008
    • Shinji HIMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Susceptor device
    • Publication number 20040065259
    • Publication date Apr 8, 2004
    • Sumitomo Osaka Cement Co., Ltd.
    • Hiroshi Inazumachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Chucking apparatus and production method for the same
    • Publication number 20030090070
    • Publication date May 15, 2003
    • Sumitomo Osaka Cement Co., Ltd.
    • Kazunori Endou
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Susceptor and manufacturing method thereof
    • Publication number 20020006678
    • Publication date Jan 17, 2002
    • Hiroshi Inazumachi
    • H01 - BASIC ELECTRIC ELEMENTS