Hiroshi Isoyama

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus and method of manufacturing article
- Patent number 9,257,921
- Issue date Feb 9, 2016
- Canon Kabushiki Kaisha
- Yoshinori Makita
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150357944
- Publication date Dec 10, 2015
- Canon Kabushiki Kaisha
- Yoshinori Makita
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER