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Hiroshi Kaneko
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Nirasaki-Shi, JP
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last 30 patents
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Patent Grant
Probe system
Patent number
6,762,616
Issue date
Jul 13, 2004
Tokyo Electron Limited
Koji Kawaguchi
G01 - MEASURING TESTING
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Patent Application
Probe system
Publication number
20030112002
Publication date
Jun 19, 2003
Koji Kawaguchi
G01 - MEASURING TESTING