Hiroshi Kannan

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma generation method, cleaning method, and substrate processing...
- Patent number 8,574,448
- Issue date Nov 5, 2013
- Tokyo Electron Limited
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing unit, method of detecting end point of cleanin...
- Patent number 8,075,698
- Issue date Dec 13, 2011
- Tokyo Electron Limited
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply facility of a chamber and a method for an internal press...
- Patent number 7,594,517
- Issue date Sep 29, 2009
- Fujikin Incorporated
- Hiroshi Kannan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Heat-treating apparatus and heat-treating method
- Patent number 6,991,684
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150004721
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Toshikazu Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Generation Method, Cleaning Method, and Substrate Processing...
- Publication number 20100252068
- Publication date Oct 7, 2010
- TOKYO ELECTRON LIMITED
- Hiroshi Kannan
- B08 - CLEANING
Information Patent Application
A PROCESSING METHOD FOR PROCESSING A SUBSTRATE PLACED ON A PLACEMEN...
- Publication number 20090214758
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Hiroshi KANNAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Thin Film, Thin Film Forming Apparatus, Program a...
- Publication number 20080241385
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Yasuhiro Oshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Supply Facility Of A Chamber And A Fethod For An Internal Press...
- Publication number 20070193628
- Publication date Aug 23, 2007
- Hiroshi Kannan
- G05 - CONTROLLING REGULATING
Information Patent Application
Processing method
- Publication number 20070160757
- Publication date Jul 12, 2007
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for generating plasma method for cleaning and method for tre...
- Publication number 20060226119
- Publication date Oct 12, 2006
- TOKYO ELECTRON LIMITED
- Hiroshi Kannan
- B08 - CLEANING
Information Patent Application
Processing apparatus and processing method
- Publication number 20060154383
- Publication date Jul 13, 2006
- TOKYO ELECTRON LIMITED
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing device and processing method
- Publication number 20060096531
- Publication date May 11, 2006
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing unit, method of detecting end point of cleanin...
- Publication number 20050241761
- Publication date Nov 3, 2005
- TOKYO ELECTRON LIMITED
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing device and processing method
- Publication number 20050211167
- Publication date Sep 29, 2005
- TOKYO ELECTRON LIMITED
- Isao Gunji
- C30 - CRYSTAL GROWTH
Information Patent Application
Processing device and processing method
- Publication number 20050145333
- Publication date Jul 7, 2005
- TOKYO ELECTRON LIMITED
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing system, processing method and mounting member
- Publication number 20050011441
- Publication date Jan 20, 2005
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing apparatus
- Publication number 20040250765
- Publication date Dec 16, 2004
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thin-film deposition apparatus and method for rapidly switching sup...
- Publication number 20040112289
- Publication date Jun 17, 2004
- TOKYO ELECTRON LIMITED
- Shuji Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat-treating apparatus and heat-treating method
- Publication number 20040035359
- Publication date Feb 26, 2004
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hiroshi Kannan

Person

Patents Grantslast 30 patents

Plasma generation method, cleaning method, and substrate processing...

Substrate processing unit, method of detecting end point of cleanin...

Gas supply facility of a chamber and a method for an internal press...

Heat-treating apparatus and heat-treating method

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Plasma Generation Method, Cleaning Method, and Substrate Processing...

A PROCESSING METHOD FOR PROCESSING A SUBSTRATE PLACED ON A PLACEMEN...

Method of Forming Thin Film, Thin Film Forming Apparatus, Program a...

Gas Supply Facility Of A Chamber And A Fethod For An Internal Press...

Processing method

Method for generating plasma method for cleaning and method for tre...

Processing apparatus and processing method

Processing device and processing method

Substrate processing unit, method of detecting end point of cleanin...

Processing device and processing method

Processing device and processing method

Processing system, processing method and mounting member

Processing apparatus

Thin-film deposition apparatus and method for rapidly switching sup...

Heat-treating apparatus and heat-treating method