Hiroshi Kato

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding method and substrate processing apparatus
- Patent number 10,128,139
- Issue date Nov 13, 2018
- SCREEN Holdings Co., Ltd.
- Kazutaka Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding and rotating device, substrate processing device...
- Patent number 9,962,744
- Issue date May 8, 2018
- SCREEN Holdings Co., Ltd.
- Hiroshi Kato
- B08 - CLEANING
Information Patent Grant
Substrate processing method for transferring a substrate
- Patent number 9,643,220
- Issue date May 9, 2017
- SCREEN Holdings Co., Ltd.
- Hiroshi Kato
- B08 - CLEANING
Information Patent Grant
Substrate holding and rotating device, substrate treatment apparatu...
- Patent number 9,385,020
- Issue date Jul 5, 2016
- SCREEN Holdings Co., Ltd.
- Hiroshi Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inverting apparatus and substrate processing apparatus
- Patent number 9,324,602
- Issue date Apr 26, 2016
- SCREEN Holdings Co., Ltd.
- Takashi Shinohara
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate treating method and substrate treating apparatus
- Patent number 7,074,726
- Issue date Jul 11, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Hiroaki Sugimoto
- B08 - CLEANING
Information Patent Grant
Treating liquid supplying apparatus for a substrate spin treating a...
- Patent number 5,514,215
- Issue date May 7, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhisa Takamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE ALIGNMENT DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRA...
- Publication number 20230010624
- Publication date Jan 12, 2023
- SCREEN Holdings Co., Ltd.
- Nobuaki OKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBST...
- Publication number 20220093420
- Publication date Mar 24, 2022
- SCREEN Holdings Co., Ltd.
- Tomoyuki SHINOHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160284585
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Kazutaka KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160221045
- Publication date Aug 4, 2016
- SCREEN Holdings, Co., Ltd.
- Hiroshi Kato
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDING AND ROTATING DEVICE, SUBSTRATE PROCESSING DEVICE...
- Publication number 20160096205
- Publication date Apr 7, 2016
- SCREEN Holdings Co., Ltd.
- Hiroshi KATO
- B08 - CLEANING
Information Patent Application
SUBSTRATE INVERTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150131088
- Publication date May 14, 2015
- SCREEN Holdings Co., Ltd.
- Takashi Shinohara
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130333731
- Publication date Dec 19, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Hiroshi KATO
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDING AND ROTATING DEVICE, SUBSTRATE TREATMENT APPARATU...
- Publication number 20130152971
- Publication date Jun 20, 2013
- Hiroshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus and substrate treating method
- Publication number 20060207969
- Publication date Sep 21, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Hiroaki Sugimoto
- B08 - CLEANING
Information Patent Application
Substrate treating method and substrate treating apparatus
- Publication number 20030140949
- Publication date Jul 31, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Hiroaki Sugimoto
- B08 - CLEANING

Hiroshi Kato

Person

Patents Grantslast 30 patents

Substrate holding method and substrate processing apparatus

Substrate holding and rotating device, substrate processing device...

Substrate processing method for transferring a substrate

Substrate holding and rotating device, substrate treatment apparatu...

Substrate inverting apparatus and substrate processing apparatus

Substrate treating method and substrate treating apparatus

Treating liquid supplying apparatus for a substrate spin treating a...

Patents Applicationslast 30 patents

SUBSTRATE ALIGNMENT DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRA...

SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBST...

SUBSTRATE HOLDING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE HOLDING AND ROTATING DEVICE, SUBSTRATE PROCESSING DEVICE...

SUBSTRATE INVERTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE HOLDING AND ROTATING DEVICE, SUBSTRATE TREATMENT APPARATU...

Substrate treating apparatus and substrate treating method

Substrate treating method and substrate treating apparatus