Hiroshi Kawaguchi

Person

Ehime, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Insulating structure
- Patent number 10,497,546
- Issue date Dec 3, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion generator
- Patent number 10,361,058
- Issue date Jul 23, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generator and method of controlling ion generator
- Patent number 10,283,326
- Issue date May 7, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- B08 - CLEANING
Information Patent Grant
Wafer charge compensation device and ion implantation system having...
- Patent number 7,304,319
- Issue date Dec 4, 2007
- SEN Corporation, an SHI and Axcelis Company
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam space-charge compensation device and ion implantation system h...
- Patent number 7,276,711
- Issue date Oct 2, 2007
- SEN Corporation, an SHI and Axcelis Company
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus equipped with plasma shower and ion impl...
- Patent number 6,753,539
- Issue date Jun 22, 2004
- Sumitomo Eaton Nova Corporation
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection method of coating film thickness and ion implantation equ...
- Patent number 6,663,791
- Issue date Dec 16, 2003
- Sumitomo Eaton Nova Corporation
- Hiroshi Kawaguchi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INSULATING STRUCTURE
- Publication number 20180261434
- Publication date Sep 13, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION GENERATOR
- Publication number 20180254166
- Publication date Sep 6, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATOR AND METHOD OF CONTROLLING ION GENRATOR
- Publication number 20170140898
- Publication date May 18, 2017
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- B08 - CLEANING
Information Patent Application
Beam space-charge compensation device and ion implantation system h...
- Publication number 20060113491
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer charge compensation device and ion implantation system having...
- Publication number 20060113492
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation apparatus equipped with plasma shower and ion impl...
- Publication number 20030160190
- Publication date Aug 28, 2003
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Hiroshi Kawaguchi

Person

Patents Grantslast 30 patents

Insulating structure

Ion generator

Ion generator and method of controlling ion generator

Wafer charge compensation device and ion implantation system having...

Beam space-charge compensation device and ion implantation system h...

Ion implantation apparatus equipped with plasma shower and ion impl...

Detection method of coating film thickness and ion implantation equ...

Patents Applicationslast 30 patents

INSULATING STRUCTURE

ION GENERATOR

ION GENERATOR AND METHOD OF CONTROLLING ION GENRATOR

Beam space-charge compensation device and ion implantation system h...

Wafer charge compensation device and ion implantation system having...

Ion implantation apparatus equipped with plasma shower and ion impl...