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Hiroshi Kawano
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Fukushima, JP
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last 30 patents
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Patent Grant
Apparatus for polishing chamfers of a wafer
Patent number
5,317,836
Issue date
Jun 7, 1994
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Grant
Method and an apparatus for polishing wafer chamfers
Patent number
5,316,620
Issue date
May 31, 1994
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING