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Plasma processing apparatus
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Patent number 10,229,814
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Issue date Mar 12, 2019
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PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
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Tomohiro Okumura
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 10,147,585
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Issue date Dec 4, 2018
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PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
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Tomohiro Okumura
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Plasma processing apparatus
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Patent number 9,343,269
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Issue date May 17, 2016
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PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
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Tomohiro Okumura
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Plasma processing method
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Patent number 8,802,567
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Issue date Aug 12, 2014
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Panasonic Corporation
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Tomohiro Okumura
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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