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Hiroshi Kikuchi
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Hitachi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Surface inspection apparatus and surface inspection method
Patent number
9,036,141
Issue date
May 19, 2015
Hitachi High-Technologies Corporation
Terumi Obuchi
G01 - MEASURING TESTING
Information
Patent Grant
Inspecting apparatus and inspecting method
Patent number
8,937,714
Issue date
Jan 20, 2015
Hitachi High-Technologies Corporation
Kimiaki Ando
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus and method utilizing multiple inspectio...
Patent number
8,558,999
Issue date
Oct 15, 2013
Hitachi High-Technologies Corporation
Koji Kawaki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD
Publication number
20120327403
Publication date
Dec 27, 2012
Hitachi High-Technologies Corporation
Terumi OBUCHI
G01 - MEASURING TESTING
Information
Patent Application
INSPECTING APPARATUS AND INSPECTING METHOD
Publication number
20120314211
Publication date
Dec 13, 2012
Hitachi High-Technologies Corporation
Kimiaki Ando
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for inspecting defects
Publication number
20080239292
Publication date
Oct 2, 2008
Hitachi High-Technologies Corporation
Koji Kawaki
G01 - MEASURING TESTING