Hiroshi Kobayashi

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Insulating film forming method and substrate processing method
- Patent number 7,915,179
- Issue date Mar 29, 2011
- Tokyo Electron Limited
- Yoshihiro Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilevel interconnection forming method for forming a semiconduct...
- Patent number 6,066,558
- Issue date May 23, 2000
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment apparatus
- Patent number 5,728,276
- Issue date Mar 17, 1998
- TEL Varian Limited
- Jiro Katsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus with collimator exchange device
- Patent number 5,624,536
- Issue date Apr 29, 1997
- TEL Varian Limited
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus with an invertible collimator and a processing...
- Patent number 5,584,973
- Issue date Dec 17, 1996
- TEL Varian Limited
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS
- Publication number 20100307685
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Kinya Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insulating Film Forming Method and Substrate Processing Method
- Publication number 20080000551
- Publication date Jan 3, 2008
- Tokyo Electron Limited
- Yoshihiro Sato
- H01 - BASIC ELECTRIC ELEMENTS