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Hiroshi Komeda
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Koshi City, JP
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Patents Grants
last 30 patents
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Patent Grant
Cleaning device, peeling system, cleaning method and computer-reada...
Patent number
9,613,797
Issue date
Apr 4, 2017
Tokyo Electron Limited
Osamu Hirakawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Cleaning Device, Peeling System, Cleaning Method and Computer-Reada...
Publication number
20150314339
Publication date
Nov 5, 2015
TOKYO ELECTRON LIMITED
Osamu HIRAKAWA
B08 - CLEANING
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Patent Application
SEPARATION APPARATUS, SEPARATION SYSTEM, SEPARATION METHOD AND NON-...
Publication number
20140284000
Publication date
Sep 25, 2014
Yasutaka SOMA
B32 - LAYERED PRODUCTS
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Patent Application
CLEANING APPARATUS, SEPARATION SYSTEM AND CLEANING METHOD
Publication number
20130118530
Publication date
May 16, 2013
TOKYO ELECTRON LIMITED
Hiroshi KOMEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD AND CLEANING APPARATUS
Publication number
20130000684
Publication date
Jan 3, 2013
TOKYO ELECTRON LIMITED
Yasutaka SOMA
B32 - LAYERED PRODUCTS