Hiroshi KOTANI

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, maintenance method, and maintenance...
- Patent number 10,290,516
- Issue date May 14, 2019
- KOKUSAI ELECTRIC CORPOATION
- Akihiko Yoneda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, gas-purging method, method for manu...
- Patent number 10,269,603
- Issue date Apr 23, 2019
- Kokusai Electric Corporation
- Yoshihiko Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, GAS-PURGING METHOD, METHOD FOR MANU...
- Publication number 20160189993
- Publication date Jun 30, 2016
- Hitachi Kokusai Electric Inc.
- Yoshihiko NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD, AND MAINTENANCE...
- Publication number 20130253689
- Publication date Sep 26, 2013
- Hitachi Kokusai Electric Inc.
- Akihiko YONEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND METHO...
- Publication number 20130102159
- Publication date Apr 25, 2013
- Hitachi Kokusai Electric Inc.
- Hiroshi KOTANI
- H01 - BASIC ELECTRIC ELEMENTS