Hiroshi KUBOTA

Person

  • Nirasaki City, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Mask structure forming method and film forming apparatus

    • Patent number 9,852,907
    • Issue date Dec 26, 2017
    • Tokyo Electron Limited
    • Masahisa Watanabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of forming mask structure

    • Patent number 9,388,495
    • Issue date Jul 12, 2016
    • Tokyo Electron Limited
    • Masahisa Watanabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents