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Hiroshi KUBOTA
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Nirasaki City, JP
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Patents Grants
last 30 patents
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Patent Grant
Mask structure forming method and film forming apparatus
Patent number
9,852,907
Issue date
Dec 26, 2017
Tokyo Electron Limited
Masahisa Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming mask structure
Patent number
9,388,495
Issue date
Jul 12, 2016
Tokyo Electron Limited
Masahisa Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
MASK STRUCTURE FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20170263455
Publication date
Sep 14, 2017
TOKYO ELECTRON LIMITED
Masahisa WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of Forming Mask Structure, Film Forming Apparatus and Non-Tr...
Publication number
20150125606
Publication date
May 7, 2015
TOKYO ELECTRON LIMITED
Masahisa WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...