Hiroshi Kubota

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Gunma, JP

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Patents Grantslast 30 patents

Information Patent Grant
Determining carbon concentration in silicon single crystal by FT-IR
- Patent number 5,444,246
- Issue date Aug 22, 1995
- Shin-Etsu Handotai Co., Ltd.
- Yutaka Kitagawara
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determination of interstitial oxygen conce...
- Patent number 5,386,118
- Issue date Jan 31, 1995
- Shin-Etsu Handotai Co., Ltd.
- Yutaka Kitagawara
- C30 - CRYSTAL GROWTH