Hiroshi Kumada

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,529,608
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment process for wafers
- Patent number 5,500,388
- Issue date Mar 19, 1996
- Tokyo Electron Kabushiki Kaisha
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170256430
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS