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Hiroshi Maeda
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Separating method, separating apparatus, and separating system
Patent number
12,157,293
Issue date
Dec 3, 2024
Tokyo Electron Limited
Takashi Terada
B32 - LAYERED PRODUCTS
Information
Patent Grant
Bonding method for cleaning non-bonding surface of substrate
Patent number
11,626,302
Issue date
Apr 11, 2023
Tokyo Electron Limited
Yuji Mimura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Bonding system with cleaning apparatus for cleaning non-bonding sur...
Patent number
11,424,142
Issue date
Aug 23, 2022
Tokyo Electron Limited
Yuji Mimura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and structure for low density silicon oxide for fusion bondi...
Patent number
11,315,789
Issue date
Apr 26, 2022
Tokyo Electron Limited
Kiyotaka Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding system and bonding method
Patent number
10,847,495
Issue date
Nov 24, 2020
Tokyo Electron Limited
Atsushi Nagata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS
Publication number
20240079214
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Yuji Mimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE MODIFYING APPARATUS AND BONDING STRENGTH DETERMINATION METHOD
Publication number
20240079222
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Takashi Terada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEPARATING METHOD, SEPARATING APPARATUS, AND SEPARATING SYSTEM
Publication number
20230055853
Publication date
Feb 23, 2023
TOKYO ELECTRON LIMITED
Takashi Terada
B32 - LAYERED PRODUCTS
Information
Patent Application
BONDING SYSTEM AND INSPECTION METHOD OF INSPECTING COMBINED SUBSTRATE
Publication number
20220415673
Publication date
Dec 29, 2022
TOKYO ELECTRON LIMITED
Yoshitaka Otsuka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BONDING SYSTEM AND SURFACE MODIFICATION METHOD
Publication number
20220384386
Publication date
Dec 1, 2022
TOKYO ELECTRON LIMITED
Yuji Mimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING METHOD FOR CLEANING NON-BONDING SURFACE OF SUBSTRATE
Publication number
20220351987
Publication date
Nov 3, 2022
TOKYO ELECTRON LIMITED
Yuji Mimura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method And Structure for Low Density Silicon Oxide for Fusion Bondi...
Publication number
20200343092
Publication date
Oct 29, 2020
TOKYO ELECTRON LIMITED
Kiyotaka Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING SYSTEM AND BONDING METHOD
Publication number
20200294824
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Yuji Mimura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BONDING SYSTEM AND BONDING METHOD
Publication number
20190312007
Publication date
Oct 10, 2019
TOKYO ELECTRON LIMITED
Atsushi Nagata
H01 - BASIC ELECTRIC ELEMENTS