Hiroshi Marumoto

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Hillsboro, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,847,387
- Issue date Nov 24, 2020
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aqueous cleaning solution and method of protecting features on a su...
- Patent number 10,844,332
- Issue date Nov 24, 2020
- Tokyo Electron Limited
- Takayuki Toshima
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
AQUEOUS CLEANING SOLUTION AND METHOD OF PROTECTING FEATURES ON A SU...
- Publication number 20190185793
- Publication date Jun 20, 2019
- TOKYO ELECTRON LIMITED
- Takayuki Toshima
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190013217
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS