Hiroshi MARUMOTO

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,862,483
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bath systems and methods thereof
- Patent number 11,738,363
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Michael Carcasi
- B08 - CLEANING
Information Patent Grant
Method of cleaning substrate processing apparatus and system of cle...
- Patent number 10,950,465
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Shotaro Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and mem...
- Patent number 10,707,098
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,692,739
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Yosuke Kawabuchi
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,576,493
- Issue date Mar 3, 2020
- Tokyo Electron Limited
- Keisuke Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,504,718
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and re...
- Patent number 10,395,950
- Issue date Aug 27, 2019
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 9,953,840
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid supply apparatus operating method, process liquid su...
- Patent number 9,576,829
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid supply apparatus operating method, process liquid su...
- Patent number 9,508,574
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240282598
- Publication date Aug 22, 2024
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ESTIMATING FLOW RATE O...
- Publication number 20240282603
- Publication date Aug 22, 2024
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID-TREATMENT DEVICE
- Publication number 20240192111
- Publication date Jun 13, 2024
- Tokyo Electron Limited
- Hiroshi MARUMOTO
- G01 - MEASURING TESTING
Information Patent Application
ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...
- Publication number 20240096658
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
- Publication number 20240096657
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
- Publication number 20240096656
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Bath Systems and Methods Thereof
- Publication number 20230356255
- Publication date Nov 9, 2023
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307271
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307270
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- B08 - CLEANING
Information Patent Application
WAFER BATH IMAGING
- Publication number 20220405902
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Joel Estrella
- B08 - CLEANING
Information Patent Application
Bath Systems and Methods Thereof
- Publication number 20220388022
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220076968
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200020550
- Publication date Jan 16, 2020
- TOKYO ELECTRON LIMITED
- Gentaro Goshi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180264504
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Keisuke Egashira
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180254200
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180254180
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Gentaro Goshi
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS AND SYSTEM OF CLE...
- Publication number 20180158699
- Publication date Jun 7, 2018
- TOKYO ELECTRON LIMITED
- Shotaro Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180138058
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Keisuke Egashira
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180138035
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
- Publication number 20180130675
- Publication date May 10, 2018
- TOKYO ELECTRON LIMITED
- Gentaro Goshi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...
- Publication number 20170278725
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170186620
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...
- Publication number 20170043287
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20140137893
- Publication date May 22, 2014
- TOKYO ELECTRON LIMITED
- Takahisa Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...
- Publication number 20140034584
- Publication date Feb 6, 2014
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Hiroshi MARUMOTO

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Bath systems and methods thereof

Method of cleaning substrate processing apparatus and system of cle...

Substrate processing apparatus, substrate processing method and mem...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus, substrate processing method, and re...

Substrate processing method and substrate processing system

Process liquid supply apparatus operating method, process liquid su...

Process liquid supply apparatus operating method, process liquid su...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ESTIMATING FLOW RATE O...

SUBSTRATE LIQUID-TREATMENT DEVICE

ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...

ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD

ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD

Bath Systems and Methods Thereof

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

WAFER BATH IMAGING

Bath Systems and Methods Thereof

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS AND SYSTEM OF CLE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

PROCESS LIQUID SUPPLY APPARATUS OPERATING METHOD, PROCESS LIQUID SU...