Hiroshi Mase

Follow

Person

Ibaraki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma generator, ozone generator, substrate processing apparatus a...
- Patent number 7,514,377
- Issue date Apr 7, 2009
- Hitachi Kokusai Electric Inc.
- Noriyoshi Sato
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Plasma generator, ozone generator, substrate processing apparatus a...
- Publication number 20060189168
- Publication date Aug 24, 2006
- Noriyoshi Sato
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR