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ION IMPLANTER
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Publication number 20200303163
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Publication date Sep 24, 2020
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Sumitomo Heavy Industries Ion Technology Co., Ltd.
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Hiroshi Matsushita
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G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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ION IMPLANTER AND MEASURING DEVICE
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Publication number 20200211816
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Publication date Jul 2, 2020
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Sumitomo Heavy Industries Ion Technology Co., Ltd.
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Hiroshi Matsushita
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H01 - BASIC ELECTRIC ELEMENTS
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ION IMPLANTATION APPARATUS
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Publication number 20150340197
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Publication date Nov 26, 2015
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Sumitomo Heavy Industries Ion Technology Co., Ltd.
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Hiroshi Matsushita
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H01 - BASIC ELECTRIC ELEMENTS
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ION IMPLANTATION APPARATUS
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Publication number 20150340202
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Publication date Nov 26, 2015
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Sumitomo Heavy Industries Ion Technology Co., Ltd.
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Hiroshi Matsushita
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H01 - BASIC ELECTRIC ELEMENTS
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BEAM PROCESSING APPARATUS
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Publication number 20080258074
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Publication date Oct 23, 2008
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SEN Corporation, an SHI and Axcelis Company
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Mitsukuni TSUKIHARA
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H01 - BASIC ELECTRIC ELEMENTS
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